The description of friction of silicon MEMS with surface roughness: virtues and limitations of a stochastic PrandtlâTomlinson model and the simulation of vibration-induced friction reduction by W Merlijn van Spengen Viviane Turq Joost W M Frenken
Author:W Merlijn van Spengen, Viviane Turq, Joost W M Frenken , Date: January 22, 2025
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Author:W Merlijn van Spengen, Viviane Turq, Joost W M Frenken
Format: pdf
Tags: MEMS microscale friction reduction normal force modulation stochastic Prandtl–Tomlinson model surface roughness
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